FIELD: instrumentation.
SUBSTANCE: invention relates to micro sensors, particularly, to microelectromechanical systems (MEMS) for measurements of fluid and gas flows by MEMS-thermal anemometer. Proposed transducer comprises sensor composed by sensor consisting of two and more flexible lugs exposed to controlled flow. Said sensor and its electric contacts is made from piezoelectric material and acts as oscillation transducer. Besides, flexible lugs feature different lengths. Separate definite-length contact is brought to sensor of every lug. Said definite length corresponds to definite dynamic range of flow measurement while define lugs work subject to flow force: Longer contacts register low flows while shorter record high flow owing to different frequencies of intrinsic oscillations.
EFFECT: simplified design, smaller sizes.
2 cl, 1 dwg
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