MEMS PRESSURE SENSOR Russian patent published in 2024 - IPC G01L11/00 

FIELD: measuring equipment.

SUBSTANCE: invention can be used for the manufacture of microelectronic and microelectromechanical (MEMS) devices, namely pressure sensors. Essence of the invention consists in the fact that the MEMS pressure sensor comprises a lower membrane, cavity in the substrate and the upper membrane sensitive to external pressure, at the same time a heater is placed on the lower perforated fixed membrane and at least one thermocouple detecting change in temperature of lower membrane with change in external pressure, and above the upper one-piece flexible membrane there is an additional upper one-piece flexible membrane made of aluminum with thickness of 15 mcm, wherein the sealed space between the upper membrane and the substrate is filled with xenon, and the space between the two upper membranes is filled with oil.

EFFECT: providing the possibility of increasing the sensitivity of the MEMS pressure sensor and expanding the pressure measurement range due to the possibility of adjusting the sensor to the required operating mode.

1 cl, 1 dwg