REVERSIVBLE ROTATION ELECTROSTATIC MICROMOTOR Russian patent published in 2014 - IPC H02N1/00 

FIELD: electricity.

SUBSTANCE: invention relates to the sphere of electrical engineering. Reversible rotation electrostatic micromotor consists of a power supply source, control system and an angular rate sensor; it has a rotor actuated by a microactuator system and each microactuator includes a moving element with two elastically attached moving electrodes of low bending stiffness, a silicone substrate with a conducting electrode and a dielectric film with high dielectric capacity applied in-series. There are the following alternatives. Microactuators are located at the lower plane of the rotor ring; at the upper plane of the rotor ring there are applied conducting layers which are connected by respective contacts to mobile electrodes. Microactuators are located at the lower plane of three rotor rings; at the upper plane of the rotor rings there are applied conducting layers which are connected by respective contactsto mobile electrodes. Microactuators are located at the lower and upper planes of the rotor ring while conducting layers are applied at the external and internal lateral sides of the ring. Microactuators are located at the lower and upper planes of two rotor rings while conducting layers are applied at the external and internal lateral sides of the rings.

EFFECT: improving accuracy and expanding functionality of microelectromechanical systems due to use of reversible rotation micromotor as an angular shift micro- and nanopositioner, reversible high energy-consuming rotation microdrive in step-by-step mode and quasi-steady-state mode.

4 cl, 8 dwg