FIELD: electricity.
SUBSTANCE: invention refers to mycrosystem engineering and manufacturing of micromechanical resonators with electrostatic control for transducer and sensor devices and microrelays switching SHF and LF electric analogue circuits. System includes micromechanical actuator, microelectronic DC converter, vibrating element in the form of mini-piezoelectric resonator, self-oscillation resonance circuit, feedback line, phase changer, capacitor, integral logic CMOS elements, hard plate and tensile suspensions.
EFFECT: simple design and stable repeatable performance of micromechanical system.
6 cl, 3 dwg, 1 tbl
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD TO MEASURE GOOD QUALITY OF RESONANT CIRCUIT AND DEVICE FOR ITS REALISATION | 2013 |
|
RU2564699C2 |
| MICROMECHANICAL GYROSCOPE | 2013 |
|
RU2535248C1 |
| MICROELECTRONIC WELL SENSOR OF ABSOLUTE PRESSURE | 2019 |
|
RU2726908C1 |
| ELECTRODE STRUCTURE FOR MICRO-MECHANICAL GYROSCOPE AND MICRO-MECHANICAL GYROSCOPE ON BASE OF THAT STRUCTURE | 2006 |
|
RU2320962C1 |
| GYROSCOPE ACCELEROMETRE | 2008 |
|
RU2381510C1 |
| FREQUENCY CONTROL PROCESS FOR VOLUME ACOUSTIC WAVE CAVITY | 1993 |
|
RU2121750C1 |
| DEVICE FOR MEASURING MAGNETIC SUSCEPTIBILITY | 0 |
|
SU907485A1 |
| DEVICE FOR EXCITING ULSTRASONIC OSCILLATIONS | 0 |
|
SU766667A1 |
| GENERATOR | 2007 |
|
RU2340078C1 |
| TIMING SYSTEM INCORPORATING INTEGRATED MICROMECHANICAL RING RESONATOR | 2000 |
|
RU2249299C2 |
