FIELD: chemistry.
SUBSTANCE: method of manufacturing ferroelectric capacitors includes formation of a ceramic substrate, mainly barium titanate-based, application of an alloying coating, vacuum spraying of copper electrodes and vacuum annealing of a composite material, with the alloying coating being applied in a liquid phase by condensation from a vapour flow of evaporated in vacuum metals, selected from the group: titanium, vanadium, chrome, manganese, niobium, at a temperature of the substrate of 150-350°C, after which the substrate with the alloying coating is subjected to vacuum annealing, and further application of copper electrodes is carried out directly on the composite substrate heated up to a temperature not higher than 600°C.
EFFECT: increased specific capacity of a ferroelectric capacitor, resistance to breakdown voltage without dielectric loss.
1 tbl, 2 ex
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Authors
Dates
2014-07-20—Published
2013-01-24—Filed