FIELD: physics; semiconductors.
SUBSTANCE: when making a photoelectric cell based on germanium, a dielectric film is deposited on the face of an n-type germanium monocrystalline substrate. Through chemical etching, windows are made in the dielectric film, corresponding to the topology of the p-n junction. The germanium surface layer is doped by diffusing zinc from the gaseous phase in a quasiclosed container into the windows. The p-n junction is removed from the back of the substrate. Back and front contacts are deposited and calcined. The structure is divided into separate photocells by etching and an antireflection coating is deposited.
EFFECT: simpler technology and increased efficiency of the process of making germanium photocells with high photocurrent value.
10 cl, 3 dwg, 1 ex
Title | Year | Author | Number |
---|---|---|---|
METHOD OF MAKING PHOTOELECTRIC CONVERTER BASED ON GERMANIUM | 2008 |
|
RU2377697C1 |
METHOD FOR PRODUCTION OF GaSb-BASED PHOTOCONVERTER | 2014 |
|
RU2575972C1 |
METHOD OF MANUFACTURING A GASB-BASED PHOTOELECTRIC CONVERTER | 2019 |
|
RU2710605C1 |
METHOD OF MAKING SOLAR PHOTOELECTRIC CONVERTER | 2010 |
|
RU2437186C1 |
METHOD FOR MANUFACTURING A PHOTOELECTRIC CONVERTER ON A TAPERED GERMANIUM SUBSTRATE | 2021 |
|
RU2781508C1 |
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERTER BASED ON GaInAsSb | 2023 |
|
RU2813746C1 |
METHOD OF MAKING GAAS-BASED PHOTOCELL | 2015 |
|
RU2607734C1 |
FABRICATION OF GaAs-BASED PHOTO INVERTER | 2013 |
|
RU2547004C1 |
METHOD FOR PREPARATION OF PHOTOELECTRIC TRANSDUCER | 2007 |
|
RU2354008C1 |
METHOD OF MAKING PULSE PHOTODETECTOR | 2018 |
|
RU2676221C1 |
Authors
Dates
2009-12-27—Published
2008-10-28—Filed