PLASMA GENERATOR AND METHOD OF ITS CONTROL Russian patent published in 2014 - IPC H01J27/16 

FIELD: electricity.

SUBSTANCE: invention is related to plasma engineering, namely, to plasma generators. The application describes a plasma generator comprising a body, which covers an ionisation chamber with at least one output hole in it, at least one connection entering the ionisation chamber for supply of working gas and at least one electric coil system covering at least a part of the ionisation chamber and electrically connected to a source of AC current of high frequency, from which to at least one coil of the coil system the AC current of high frequency is supplied, at the same time there is another source of current, from which to at least one coil of the coil system the DC or AC current of lower frequency is fed, compared to the AC current of high frequency from its source.

EFFECT: reduced losses of capacity caused by recombination of ions/electrons on walls.

12 cl, 11 dwg