METHOD OF COATING APPLICATION IN VACUUM Russian patent published in 2018 - IPC G02B1/10 

FIELD: technological processes.

SUBSTANCE: using: for the deposition of coatings on a vacuum installation with a linear source of ions. Summary of the invention is thatsputtering the target onto a stationary test substrate is carried out, a thickness distribution of the coating is obtained over the surface of this substrate, and a thickness control is performed during application of the coating to the working substrate, on which the linear ion source and the target are mounted, combine the middle of the inflection line of the surface distribution of the coating thickness with the center of the rotating working substrate, coating is applied to the substrate and at the same time a through inspection of the optical thickness of the coating is carried out both along the axis of rotation passing through the center of the substrate and at a distance from the center of the substrate, and by the difference in the signals obtained from the control devices at the center and at a distance from the center of the substrate, correcting the position of the inflection line of the thickness distribution relative to the axis of rotation of the substrate by moving the platform with a linear ion source and target during application.

EFFECT: technical result: providing the possibility of obtaining homogeneous multilayer coatings of interference filters and mirrors with control of the thickness and uniformity of multilayer coatings during spraying.

1 cl, 4 dwg