APPLICATION OF COAT ONTO QUARTZ CRUCIBLE INNER SURFACE Russian patent published in 2014 - IPC C30B15/10 C30B29/06 

Abstract RU 2527790 C1

FIELD: metallurgy.

SUBSTANCE: protective coat is applied on quartz crucible inner surface by its processing with the mix of gases H2, CO and H2O at their ratio of 2:28:18 at 1150-1200°C for 1 hour. Thereafter, said crucible is subjected to heat treatment at 1150-1200°C for an hours unless hard surface results.

EFFECT: invention allows production of 150-200 mcm deep silicon dioxide coats, homogeneous surface without growth flaws, better manufacturability, simple equipment, low energy costs.

1 dwg, 2 ex

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RU 2 527 790 C1

Authors

Vlasov Oleg Anatol'Evich

Dates

2014-09-10Published

2013-03-25Filed