FIELD: technological processes.
SUBSTANCE: invention is related to the field of semiconductor materials production. Method includes generation of coating by application of metal compounds onto internal and/or external surfaces of side walls and bottom part of previously heated quartz crucible, at that coat formation is done with application of solutions or suspensions of zirconium and/or hafnium solutions, which contain surface-active compounds based on ethylene oxide, then treatment is done first with microwave radiation action and then by heating up to temperature of 600-800°C and soaking at this temperature. Preferably treatment is done by microwave radiation in continuous or interrupted mode with frequency from 800 to 1500 MHz for 20-30 minutes.
EFFECT: increased service life of crucible.
9 cl, 7 ex
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