METHOD OF PRODUCTION OF THIN-FILM ORGANIC COATING Russian patent published in 2014 - IPC C09D201/00 C09D179/00 B32B7/04 H01L27/28 H01L51/30 B82B1/00 

Abstract RU 2529216 C1

FIELD: nanotechnology.

SUBSTANCE: invention relates to a technology of nanomaterials and nanostructures, and can be used to produce thin-film polymeric materials and coatings used in sensing, analytical, diagnostic and other devices, and when creating the protective dielectric coatings. The method of production of thin-film organic coating of cationic polyelectrolyte comprises modification of the substrate, preparing the aqueous solution of cationic polyelectrolyte with the adsorption of polyelectrolyte on the substrate, washing, drying the substrate with the deposited layer. The substrate is used as monocrystalline silicon with roughness less than or comparable with the thickness of the obtained coating. To generate the negative electrostatic charge the substrate is modified in the solution of alkali, hydrogen peroxide and water at 75°C for 15 min. During the adsorption the substrate is illuminated from the side of the solution with light having intensity in the range of 2-8 mW/cm2 and with wavelengths of the range of intrinsic absorption of silicon.

EFFECT: invention enables to reduce the roughness and thickness of the organic coating.

3 cl, 3 dwg, 5 tbl, 6 ex

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RU 2 529 216 C1

Authors

Stetsjura Svetlana Viktorovna

Maljar Ivan Vladislavovich

Dates

2014-09-27Published

2013-02-11Filed