METHOD FOR MANUFACTURING A BIOSENSOR STRUCTURE Russian patent published in 2023 - IPC H10K71/12 

FIELD: sensor devices.

SUBSTANCE: invention is related to a technology for manufacturing sensor structures based on a solid-state semiconductor and a functional organic coating and can be used to create enzyme biosensors based on field-effect transistors or "electrolyte-dielectric-semiconductor" structures. The method for manufacturing a biosensor structure includes modification of a semiconductor electrochemical converter to create an effective negative electrostatic charge, as well as layer-by-layer adsorption of a layer of polycationic polymer molecules and a layer of polycationic enzyme molecules from their aqueous solution. A plate of single-crystal silicon with a hole type of conductivity is used, and its modification is carried out by boiling the semiconductor plate in an ammonium peroxide solution NH₄OH/H₂O₂/H₂O=1/1/4, and in the process of adsorption of enzyme molecules or immediately before the process of adsorption onto the surface of the Si/SiO₂/polyethyleneimine structure, the structure is illuminated from the solution side with an intensity sufficient to change the charge density of the surface of the semiconductor structure during adsorption.

EFFECT: increase of sensitivity to the analyte due to the increase in the number of molecules in the monolayer of the enzyme on the modified surface of the semiconductor converter.

1 cl, 1 ex, 4 dwg