METHOD OF PRODUCING BIOSENSOR STRUCTURE Russian patent published in 2018 - IPC H01L51/40 

FIELD: chemistry.

SUBSTANCE: method involves modifying a semiconductor electrochemical converter to create an effective negative electrostatic charge, as well as layer-by-layer adsorbing a layer of polycationic polymer molecules and a layer of polyanionic enzyme molecules from their aqueous solution. A plate of single-crystal silicon with an electronic conductivity type is used, and its modification is carried out by boiling a semiconductor plate in a peroxide-ammonia solutionNH₄OH/H₂O₂/H₂O=1/1/4, and during the adsorption of the enzyme molecules, or immediately before the adsorption process, to the surface of the "n-Si/SiO_2/polyethyleneimine", the structure is illuminated from the solution side with an intensity sufficient to change the charge density of the semiconductor structure surface during the adsorption time.

EFFECT: increasing the sensitivity to the analyte due to an increase in the number of molecules in the enzyme monolayer on the modified semiconductor converter surface.

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