FIELD: process engineering.
SUBSTANCE: invention relates to treatment of materials by plasma. Proposed sprayer comprises working chamber (2) to be evacuated that accommodates substrate (3) and plasma torch (4) to generated plasma jet (5) by heating of process gas. Note here that said plasma torch (4) has atomizer (41) to force plasma jet (5) from atomizer (4) and along lengthwise axis (A) in working chamber (2). Mechanical limiter (12) can be arranged downstream of atomizer (41) in chamber (2) to extend along said axis (A) to protect plasma jet (5) against undesirable later penetration of particles.
EFFECT: higher quality.
11 cl, 5 dwg
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