FIELD: chemistry.
SUBSTANCE: described is method of obtaining trichlorosilane, in which silicon particles react with tetrachlorosilane, hydrogen and, optionally, with hydrogen chloride in reactor (101) with fluidised bed with obtaining flow of trichlorosilane-containing gaseous product, with flow of trichlorosilane-containing gaseous product being discharged from reactor (101) through output hole (117), before which installed is at least one particle separator (118), which selectively passes only silicon particles with size, which is smaller than specified maximal size, and in which preferably after equal time intervals or continuously through at least one more output hole (109, 112) without such particle separator silicon particles are withdrawn from reactor (101). In addition, described is system (100), suitable for said method realisation, which contains first reactor (101) with fluidised bed and second reactor (102) with fluidised bed, connected in such a way that silicon, withdrawn from first reactor (101) can be supplied into second reactor (102).
EFFECT: described is method of obtaining trichlorosilane.
8 cl, 1 dwg
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Authors
Dates
2015-04-10—Published
2010-08-02—Filed