METHOD OF PRODUCING GRAPHENE HYBRID AND CARBON NANOTUBES Russian patent published in 2015 - IPC C01B31/02 B82B3/00 B82Y30/00 

Abstract RU 2548989 C2

FIELD: chemistry.

SUBSTANCE: invention relates to chemistry and can be used in producing nanoelectronic, optoelectronic, sensor and photovoltaic devices, as well as for storing energy. The method includes depositing an aluminium film with thickness of 1-100 nm on an insulated substrate, sputtering thereon a film of a transition metal, e.g. Fe, Co or Ni, with thickness of 0.1-10 nm, annealing in air at temperature of 200-950°C for 0.1-10 min, heating to temperature of 700-1000°C in a reactor which is evacuated to pressure of 10-4-10-10 Torr. The method further includes successively releasing a carbon-containing gas to pressure of 1-10-4 Torr and evacuating the reactor every 1-30 s while simultaneously cooling to room temperature at a rate of 1-100°C/min.

EFFECT: invention enables to obtain films of hybrid graphene and carbon nanotubes with a given configuration at predetermined places using a simple and technologically effective method.

5 cl, 5 dwg, 5 ex

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RU 2 548 989 C2

Authors

Matveev Viktor Nikolaevich

Kononenko Oleg Viktorovich

Levashov Vladimir Ivanovich

Volkov Vladimir Timofeevich

Khodos Igor' Ivanovich

Dates

2015-04-20Published

2013-06-06Filed