FIELD: chemistry.
SUBSTANCE: invention relates to chemistry and can be used in producing nanoelectronic, optoelectronic, sensor and photovoltaic devices, as well as for storing energy. The method includes depositing an aluminium film with thickness of 1-100 nm on an insulated substrate, sputtering thereon a film of a transition metal, e.g. Fe, Co or Ni, with thickness of 0.1-10 nm, annealing in air at temperature of 200-950°C for 0.1-10 min, heating to temperature of 700-1000°C in a reactor which is evacuated to pressure of 10-4-10-10 Torr. The method further includes successively releasing a carbon-containing gas to pressure of 1-10-4 Torr and evacuating the reactor every 1-30 s while simultaneously cooling to room temperature at a rate of 1-100°C/min.
EFFECT: invention enables to obtain films of hybrid graphene and carbon nanotubes with a given configuration at predetermined places using a simple and technologically effective method.
5 cl, 5 dwg, 5 ex
Title | Year | Author | Number |
---|---|---|---|
METHOD OF OBTAINING GRAPHENE FILM | 2011 |
|
RU2500616C2 |
CARBON NANOSTRUCTURES AND MESHES OBTAINED BY CHEMICAL PRECIPITATION FROM STEAM PHASE | 2011 |
|
RU2579075C2 |
METHOD OF PRODUCTION OF THE CARBONIC NANOTUBES WITH THE INCAPCULATED PARTICLES OF NICKEL AND COBALT AND THE INSTALLATION FOR THE SYNTHESIS OF THE MATERIALS BASED ON THE CARBONIC NANOTUBES AND NANOPARTICLES OF NICKEL AND COBALT | 2005 |
|
RU2310601C2 |
METHOD FOR PRODUCTION OF CARBON NANOTUBES | 2009 |
|
RU2397951C1 |
METHOD OF CARBON NANOSTRUCTURES PREPARATION | 2007 |
|
RU2355625C1 |
METHOD OF PREPARING NITROGEN-CONTAINING CARBON MATERIAL WITH NANOTUBE STRUCTURE | 2008 |
|
RU2391289C2 |
METHOD OF PRODUCTION OF CARBON NANOTUBES | 2014 |
|
RU2571150C2 |
METHOD FOR PRODUCING CARBON NANOFIBERS | 2016 |
|
RU2634126C1 |
METHOD FOR PRODUCING STABILIZED LINEAR CARBON CHAINS IN A LIQUID | 2019 |
|
RU2744089C1 |
HYBRID NANOCOMPOSITE FUNCTIONAL MATERIAL NaTiO -α-FeO | 2023 |
|
RU2811202C1 |
Authors
Dates
2015-04-20—Published
2013-06-06—Filed