FIELD: chemistry.
SUBSTANCE: invention can be applied in production of transparent electrodes and instruments of nano-electronics. Graphene film is obtained by sedimentation of carbon from carbon-containing gas in vacuum on catalyst-covered substrate, preliminarily heated to temperature, which exceeds carbon-containing gas decomposition. Carbon-containing gas is supplied to pressure 1-10-4 Torr. Exhaustion of reactor is carried out 1-300 s after supply of carbon-containing gas with its simultaneous cooling to room temperature at rate 10-100°/min. As carbon-containing gas, taken is gas, selected from the group: acetylene, methane, ethane, propane, butane, ethylene, hexane or combination of said gases with inert gas. As catalyst, applied is metal, selected from the group: Fe, Ni, Cu or combination of metals, which includes at least two of upper mentioned metals. Catalyst film is 1-5000 nm wide.
EFFECT: invention ensures obtaining graphene film by simple and technological method.
9 cl, 6 dwg, 14 ex
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Authors
Dates
2013-12-10—Published
2011-11-03—Filed