FIELD: chemistry.
SUBSTANCE: invention relates to production of monocrystalline diamond material by chemical vapour deposition (CVD), which is used in optical, mechanical, fluorescent and/or electronic devices. A diamond layer contains a mesh of nonparallel intercrossing dislocations as seen on an X-ray topographic sectional image or in conditions of a fluorescent technique, wherein the layer has thickness equal to or greater than 1 mcm; the mesh of nonparallel dislocations stretches across a volume which is at least 30% of the total volume of the diamond layer, and wherein the mesh of nonparallel dislocations contains a first set of dislocations propagating in a first direction through the diamond layer, and a second set of dislocations propagating in a second direction through the diamond layer, wherein the angle between the first and second directions is in the range of 40° to 100°, as seen on an X-ray topographic sectional image or in conditions of a fluorescent technique.
EFFECT: invention enables to control the type and/or direction of dislocations in a diamond material without affecting optical and/or electronic properties of devices based on said material and optimise said properties for a specific application.
12 cl, 8 dwg, 2 tbl, 3 ex
Title | Year | Author | Number |
---|---|---|---|
SINGLE CRYSTAL DIAMOND MATERIAL | 2010 |
|
RU2519104C2 |
SYNTHETIC CVD DIAMOND | 2010 |
|
RU2516574C2 |
PLATE MADE FROM MONOCRYSTALLINE DIAMOND (VERSIONS) AND METHOD OF OBTAINING IT | 2003 |
|
RU2332532C2 |
METHOD FOR REFINEMENT OF SUBSTRATE ORIENTATION FOR DIAMOND EPITAXY | 2012 |
|
RU2539903C2 |
MONOCRYSTALLINE SYNTHETIC DIAMOND MATERIAL OBTAINED BY CHEMICAL DEPOSITION FROM GAS PHASE | 2017 |
|
RU2705356C1 |
METHOD OF OBTAINING FANCY LIGHT-BLUE OR FANCY LIGHT GREENISH BLUE MONOCRYSTALLINE CVD-DIAMOND AND OBTAINED PRODUCT | 2010 |
|
RU2540624C2 |
OBTAINED BY CHEMICAL DEPOSITION FROM VAPOR PHASE MONOCRYSTALLINE SYNTHETIC DIAMOND MATERIALS, WHICH HAVE UNIFORM COLOUR | 2013 |
|
RU2595671C1 |
METHOD OF PROCESSING MONOCRYSTALLINE CVD-DIAMOND AND THE OBTAINED PRODUCT | 2010 |
|
RU2580916C1 |
METHOD OF PROCESSING MONOCRYSTALLINE CVD-DIAMOND AND OBTAINED PRODUCT | 2010 |
|
RU2540611C2 |
BORON-ALLOYED DIAMOND | 2002 |
|
RU2315826C2 |
Authors
Dates
2015-05-10—Published
2011-12-16—Filed