PLANT AND METHOD TO APPLY COATING ONTO SUBSTRATE Russian patent published in 2015 - IPC C23C14/34 C23C14/54 

FIELD: technological processes.

SUBSTANCE: invention relates to a plant and a method to apply a coating onto a substrate. The plant comprises a vacuum chamber, in the inner space of which the substrate is placed for application of a coating onto it, and at least one sprayed target, and a device to determine wear of the sprayed target. Application of the coating is carried out by ablation of the target in process of plant operation and bombarding of the substrate with produced particles. At least one window is available in the wall of the vacuum chamber. The device to determine wear of the sprayed target comprises a metering device for optical measurement of the distance between at least one previously determined point outside the vacuum chamber and at least one previously determined point on the surface of the sprayed target. The metering device also comprises an assessment device, by means of which one of the following is corrected: parallax or geometric distortion of planar surface of the target.

EFFECT: method improvement.

13 cl, 6 dwg