DEVICE FOR SPATTERING OF THIN FILM COATINGS ON SPHERICAL ROTOR OF ELECTROSTATIC GYROSCOPE Russian patent published in 2015 - IPC C23C14/50 B05C13/00 

FIELD: machine building.

SUBSTANCE: device contains a vacuum chamber, inside it a spattering source and rotor rotation gear in form of two frames are installed, they are made with possibility of independent rotation, retainers rigidly connected to the internal frame to secure the rotor, they are in form of coaxial needle thrusts. The frames are made in form of concentric semirings, and needle thrusts are secured in diametrically located points at ends of the semiring of the internal frame. Axis of rotation of the frames, and axis of the needle thrusts cross at one point coinciding with the rotor centre at its securing in the said thrusts. Axis of rotation of the internal frame is inclined to axis of rotation of the external frame at angle α = 35°-80°. Rotation drive of the internal frame is made in form of the rotating-step mechanism containing rod rigidly connected with the chamber casing, and tooth-wheel secured on the shaft of the internal frame rotation. At that quantity and configuration of teeth of the tooth-wheel are determined on the condition of rotation of the internal frame at the wheel contact with the rod by angle β equal to 30°-90°.

EFFECT: increased accuracy and quality of application of thin film coatings.

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