METHOD FOR DEPOSITION OF CADMIUM COATING BY PRECISION VACUUM SPRAYING ON PART SURFACE Russian patent published in 2019 - IPC C23C14/14 C23C14/30 

FIELD: physics.

SUBSTANCE: invention relates to vacuum engineering, particularly, to vacuum spraying of coating on parts surface. Method of depositing a cadmium coating by precision vacuum sputtering on the surface of a part which is symmetrical about its own axis involves, by electron bombardment, heating the monolithic multi-crucible evaporator of cadmium and preheating the part to operating temperature, spraying the cadmium coating, at which the part is continuously rotated about its own axis, prior to evaporation of the sputtered cadmium from the crucibles, wherein arrangement of the crucibles in the evaporator and their filling with sputtered cadmium is carried out depending on the required distribution of the coating thickness on the sprayed surface of the part. Distance from evaporator to sprayed surface is equal to distance L between crucibles, defined by expression L = 1.2×D, where D is crucible diameter.

EFFECT: application of cadmium coating with controlled thickness by sectors of part ensuring high quality of sputtered layer on surface of critical part with minimum pollution of environment with cadmium in comparison with other methods.

1 cl, 1 dwg, 1 ex