CAROUSEL-TYPE UNIT FOR MULTI-LAYERED COATINGS MAGNETRON SPUTTERING AND METHOD OF EQUAL THICKNESS NANO-COATING MAGNETRON SPUTTERING Russian patent published in 2017 - IPC C23C14/35 C23C14/56 

FIELD: technological processes.

SUBSTANCE: invention relates to multi-layer equal thickness coating magnetron sputtering method and device for its implementation and can be used for optical coatings producing on optical substrates surface. Sequential application on part flat surface of two layers with complementary profiles and obtaining of equal thickness coating is performed in vacuum chamber with carousel planetary mechanism by means of magnetron system. System comprises two magnetrons with targets, symmetrically and inclined arranged to vacuum chamber frontal plane and facing with their targets towards carousel planetary mechanism and single magnetron with target. One coating layer is sputtered as symmetrical convex with single magnetron, performing inner gear wheel and said planetary gear drive reverse synchronous rotation in one direction and synchronous pinion reverse rotation in opposite direction in drive and inner gear wheel calculated range of turning angles. Pinion is rotated at angular speed by absolute value of less than drive angular rotation speed. Second coating layer is sputtered as symmetric concave by means of dual system two magnetrons, performing inner gear wheel and drive synchronous reverse rotation in one direction and synchronous pinion reverse rotation in same direction in rotation angles calculated range, different from drive rotation angles and inner gear wheel during performance of first coating layer. Pinion is rotated at angular speed by absolute value greater, than drive angular rotation speed. Producing coating with high degree of accuracy, wherein deviation of its thickness from theoretically calculated makes 0.1 nm.

EFFECT: coating with high degree of accuracy.

3 cl, 9 dwg, 1 ex