METHOD OF DRYING COATING OF SILVER-CONTAINING PASTE Russian patent published in 2015 - IPC H01L21/52 

Abstract RU 2564518 C1

FIELD: chemistry.

SUBSTANCE: process of drying silver-containing paste is carried out in a rarefied atmosphere at pressure of 5.5·103-4.0·104 Pa and air inflow at a rate of 0.5-3 l/min per 1 g silver-containing paste at operating temperature of 100-150°C for 10-60 minutes. Reducing wax content in the sintered silver layer enables to form contact connections in semiconductor power device with improved performance: low electrical resistance, low mechanical stress in the connection and high heat conductivity of the connection.

EFFECT: technology enables to obtain a connection at a low temperature with improved electrical and thermomechanical properties, as well as a longer service life compared to current technologies.

4 cl, 1 tbl

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RU 2 564 518 C1

Authors

Kablov Evgenij Nikolaevich

Lukin Vladimir Ivanovich

Ryl'Nikov Vitalij Sergeevich

Cherkasov Aleksej Fillipovich

Afanas'Ev-Khodykin Aleksandr Nikolaevich

Dates

2015-10-10Published

2014-07-01Filed