FIELD: chemistry.
SUBSTANCE: method of producing silicon nitride or silicon carbide powder includes preheating a mixture of monosilane with an inert diluent gas and a precursor. Ammonia gas or acetylene is used as the precursor. The reaction mixture is subjected to adiabatic compression until thermal decomposition, which enables to obtain the corresponding silicon compound.
EFFECT: invention enables to obtain nanosized powders of silicon compounds consisting of monodispersed particles.
4 dwg, 2 ex
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