FIELD: measurement equipment.
SUBSTANCE: vibration inertial sensor of angular speed of MEMS type comprises a support for at least two masses, which are installed as capable of displacement in respect to the support, and at least one electrostatic drive and at least one electrostatic detector, which are designed accordingly to generate and detect oscillations of masses, at the same time masses are suspended in a frame, which is connected with the help of a suspension facility to the support so that masses and the frame have three degrees of freedom in the plane relative to the support.
EFFECT: increased accuracy of sensor balancing.
14 cl, 5 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| RESONATOR FOR EMBEDDING IN INERTIAL ANGULAR SENSOR | 2018 |
|
RU2753462C2 |
| INERTIAL ANGULAR VELOCITY SENSOR WITH DEVIATION COMPENSATION | 2009 |
|
RU2483278C2 |
| INERTIAL PRIMARY INFORMATION SENSOR | 1992 |
|
RU2018133C1 |
| MICROELECTROMECHANICAL SYSTEM FOR ANGULAR VELOCITY SENSOR | 2011 |
|
RU2580879C2 |
| INERTIAL PRIMARY INFORMATION SENSOR | 1992 |
|
RU2119645C1 |
| VIBRATING GYROSCOPE USING SUPERFICIAL ULTRASONIC WAVES | 2007 |
|
RU2348902C1 |
| SOLID-STATE WAVE GYROSCOPE | 2013 |
|
RU2544870C2 |
| METHOD OF ERROR COMPENSATION FROM ANGULAR ACCELERATION OF BASE FOR CORIOLIS VIBRATION GYROSCOPE WITH CONTINUOUS RETRIEVAL OF NAVIGATIONAL DATA | 2016 |
|
RU2659097C2 |
| METHOD OF CONTINUOUS RETRIEVAL OF NAVIGATIONAL INFORMATION FROM CORIOLIS VIBRATION GYROSCOPES | 2016 |
|
RU2662456C2 |
| TUNING FORK MICROGYROSCOPE | 2014 |
|
RU2580871C1 |
