MICROELECTROMECHANICAL SYSTEM FOR ANGULAR VELOCITY SENSOR Russian patent published in 2016 - IPC G01C19/56 

FIELD: measuring equipment.

SUBSTANCE: invention relates to the measurement of the angular velocity, namely to a microelectromechanical system (MEMS) for the angular velocity sensor. MEMS is placed between the first and second plate-type silicon composite insulator composed of a plurality of elements structured silicon, electrically insulated from each other by an insulating material. MEMS comprises a monocrystalline silicon substrate is structured to form the detector system and the frame, wherein the detector system is completely separated from the surrounding frame located between its conjugate surfaces of the first and second composite wafers so that the detector system is sealed in the cavity formed by the first and second composite sheet and the frame. In this detection system comprises two seismic masses, each of which has front and rear surfaces; two drive bridge, each of which has a first end connected to the seismic mass and a second end connected to the first and second composite plates by fixed pedestals formed on the silicon substrate, and the flexural spring directly interconnects two seismic masses and configured to synchronize their primary movement. Each seismic mass has a first rotational degree of freedom about an axis substantially perpendicular to the plane of the silicon substrate, and the seismic mass and power jumpers are formed with the ability to have a second rotational degree of freedom about an axis substantially coincident with the longitudinal axis of the actuating webs. Detection system also comprises means for generating and detecting the primary motion, consisting of the primary oscillations of the two seismic masses, in antiphase, in accordance with a first rotational degree of freedom, and means for detecting a secondary movement consisting in the secondary oscillations of the two seismic masses in antiphase in According to a second rotational degree of freedom. Wherein the means for generating and detecting the first movement, and means for detecting a secondary movement formed on the front and back surfaces of each of the first and second seismic mass, and a detector system is arranged with the possibility of it when making the system of the angular velocity about the third axis in substantially in the plane of the silicon substrate and perpendicular to the longitudinal axis of the webs, the Coriolis force causes a secondary oscillation of the seismic mass.

EFFECT: invention provides improved accuracy and stability measurements.

16 cl, 11 dwg