SCANNING PROBING MICROSCOPE WITH COMPACT SCANNER Russian patent published in 2015 - IPC G01Q70/00 

Abstract RU 2571449 C2

FIELD: measurement equipment.

SUBSTANCE: invention relates to scanning probing microscopy. The scanner comprises a body of a scanner, comprising a drive and a sensor to detect scanner movement. The scanner body is made as capable of manual removal from the head and has total volume of less than approximately five cubic inches. At the same time the body has the first open end for connection of the scanner to the free end part of the head, having the external surface protruding towards the sample, and the second closed end, on which a probe holder is located, and also the internal surface passing between the first and second ends. External and internal surfaces have the identical conical shape and match with each other.

EFFECT: increased stiffness of scanner design.

18 cl, 20 dwg

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RU 2 571 449 C2

Authors

Fan Ngi

Markakis Dzheff

Kindt Jokhannes

Masser Karl

Dates

2015-12-20Published

2012-04-27Filed