METHOD TO USE SEMI-CONTACT MODE WITH FIXED PEAK OF FORCE FOR MEASUREMENT OF PHYSICAL PROPERTIES OF SAMPLE Russian patent published in 2015 - IPC G01Q60/34 

FIELD: instrumentation.

SUBSTANCE: invention relates to the field of scanning probing microscopy. According to the method of operation of the scanning probing microscope they generate relative periodical movement between the probe and the sample, probe movement is detected, instant force between the probe and the sample during interaction of the probe and the sample is restored from the detected probe movement, they detect the time zone of interest related to the restored instant force, and strobe it. As an excitation signal they use heat supplied to a sample or a probe, an external interacting field, an electromagnetic wave, optical excitation, a voltage signal or a magnetic force, and they measure the controlled physical response of the probe at the stage of generation in the time zone of interest within the period of interaction between the probe and the sample. At the same time signals different from the ones coming from the controlled area are considered to be parasite noise.

EFFECT: improvement of resolution, increased efficiency of scanning.

16 cl, 63 dwg