FIELD: physics; engineering procedures.
SUBSTANCE: scanning probing microscope contains drive gear providing detecting interaction between the probe and the sample, actuator of the probe or the sample oscillation, probe detector and feedback mechanism providing spacing control between the probe and the sample. Oscillation actuator provides relative oscillatory motion of the probe within sample fix surface so that the probe essentially linearly scans the sample surface. While scanning the sample surface, the scanning area is covered due to ordered arrangement of scanning lines, each of which is read at oscillation either of the probe, or of the sample at its resonance frequency or about its resonance frequency, so the double oscillation amplitude is equal to the maximum length of scanning line, and their ordered arrangement is provided with drive gear.
EFFECT: more rapid acquisition of sample-probe interaction data and due to this speed of reading or data recording is increased.
23 cl, 3 dwg
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