FIELD: process engineering.
SUBSTANCE: invention relates to device intended for plasma processing of gaseous medium. Claimed device comprises the generator of plasma in gaseous medium and dielectric structure composed of the tube of fused quartz. Note here that plasma can be transferred into dielectric structure and interaction chamber including the inner space and the wall.
EFFECT: efficient processing of gaseous medium, lower power input.
27 cl, 9 dwg
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Authors
Dates
2016-01-20—Published
2011-09-01—Filed