DEVICE FOR TREATMENT OF LINEN BASE IN PLASMA-STIMULATED PROCESS Russian patent published in 2020 - IPC H01J37/32 

FIELD: electricity.

SUBSTANCE: invention relates to device (10) for continuous treatment of linen base (15a) in a plasma-stimulated process. Device (10) comprises at least one treatment section (12a, 12b) with a vacuum working chamber, wherein said at least one treatment section (12a, 12b) is provided with at least one plasma processing unit (13a, 13b), which is intended to form plasma zone (14a, 14b) in working chamber for treating surface of linen base (15a). Device (10) further comprises a transfer system for continuous movement of linen base (15a, 15b) through said at least one treatment section (12a, 12b) by means of unwinding roller (20) and winding roller (21), wherein said conveying system defines traveling path of linen base (15a) via working chamber. Plasma treatment unit (13a, 13b) comprises at least one extended antenna and at least one radio-frequency generator for excitation of said extended antenna to at least one of its resonance frequencies, wherein transporting system in working chamber sets processing path section for linen base (15a), wherein the treatment path portion for linen base (15a) lies opposite the extended antenna and is located at a distance from it.

EFFECT: technical result is higher density and uniformity of plasma.

19 cl, 16 dwg