METHOD FOR CARRYING OUT GLOW DISCHARGE AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2017 - IPC H05H1/24 

FIELD: electricity.

SUBSTANCE: in method for carrying out a glow discharge, comprising igniting a glow discharge between the anode and the cathode in the gas discharge chamber with the working gas flow transverse to the direction of the electric field, when the glow discharge is ignited, the pressure in the gas discharge chamber is established from P=10 Torr and below, various concentrations of the gas particles are created in different areas of the interelectrode space, due to the organization of a supersonic working gas flow in a given area of the interelectrode gap in the transverse direction to the electric field at the gas flow rate more than V=300 m/s. The device for carrying out a glow discharge comprises the evacuation vacuum system connected to the gas discharge chamber with the anode, the cathode, the branch pipes for feeding and evacuating working gas and the device for forming working gas flow, placed therein. The device contains the confuser, and the device for forming the working gas flow is made as a supersonic nozzle representing a diffuser. The confuser and the diffuser are installed in the interelectrode space in the gas discharge chamber coaxially opposite one another in such a way that the axis of the confuser and the diffuser is located at the direction transverse to the axis of the anode and the cathode and at the predetermined distance with respect to the anode and the cathode, and there is also a branch pipe for evacuating the residual gas from the gas discharge chamber.

EFFECT: ensuring the burning of a glow discharge at a pressure of 10 Torr and below.

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