METHOD OF PRODUCING ELECTRODES OF ELECTRONIC DEVICES Russian patent published in 2016 - IPC H01J9/02 

Abstract RU 2599389 C1

FIELD: materials.

SUBSTANCE: invention relates to production of materials, surface of which has stable electrophysical properties, in particular, electrodes of gas-discharge and vacuum-tube devices (cold cathodes gas-discharge lasers, contact parts of reed relays, electrodes of mass spectrometers, etc.). Method of making electrodes of electronic instruments includes irradiating of their surface with a stream of ions of an inert gas obtained from gas discharge plasma, herewith the volume of the device is filled with neon up to the pressure of (1.5-5.0)·101 Pa, negative potential is supplied to the required electrode and abnormal glow discharge is excited between this electrode and any other structural element of the device, herewith the surface processing is stopped after stabilization of gas-discharge maintaining voltage.

EFFECT: technical result is simplification of electrodes processing technology.

1 cl, 2 dwg

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RU 2 599 389 C1

Authors

Kryutchenko Oleg Nikolaevich

Dates

2016-10-10Published

2015-05-26Filed