MATERIAL FOR CONVERSION OF VACUUM ULTRAVIOLET RADIATION INTO VISIBLE RANGE RADIATION IN FORM OF AMORPHOUS FILM OF SILICON OXIDE SiOS ON SILICON SUBSTRATE Russian patent published in 2016 - IPC C09K11/59 C09K11/56 C23C14/48 B82B3/00 

Abstract RU 2584205 C2

FIELD: chemistry.

SUBSTANCE: invention relates to luminescent materials for conversion of vacuum ultraviolet radiation into visible range radiation, intended for manufacture of functional elements new-generation photon devices, as well as to control of hard ultraviolet radiation in vacuum processes. Proposed material is characterised by that thickness of amorphous film of silicon oxide SiO2Sx is 20-70 nm, and oxygen ions are contained in an amount at which stoichiometric factor x ranges from 0.01 to 0.45.

EFFECT: invention provides high intensity of blue radiation of material and absence of red luminescence while maintaining conversion of vacuum ultraviolet radiation into visible radiation.

1 cl, 3 dwg, 1 tbl, 5 ex

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RU 2 584 205 C2

Authors

Zatsepin Anatolij Fedorovich

Kortov Vsevolod Semenovich

Buntov Evgenij Aleksandrovich

Pustovarov Vladimir Alekseevich

Hans-Joachim Fitting

Dates

2016-05-20Published

2014-06-10Filed