TIN ION-IMPLANTED SILICON OXIDE FILM ON SILICON SUBSTRATE Russian patent published in 2014 - IPC H01L21/265 B82B3/00 

Abstract RU 2535244 C1

FIELD: chemistry.

SUBSTANCE: tin ion-implanted silicon oxide film on a silicon substrate includes alpha-tin nanoclusters. The film has thickness of 80-350 nm, average tin concentration in the range of 2.16 to 7.1 at % and the alpha-tin nanoclusters have a radius of 1.5 to 4 nm.

EFFECT: film has higher intensity and a short photoluminescence bandwidth.

2 dwg, 1 tbl, 5 ex

Similar patents RU2535244C1

Title Year Author Number
METHOD OF PRODUCING QUARTZ GLASS IMPLANTED WITH TIN IONS 2011
  • Zatsepin Anatolij Fedorovich
  • Kortov Vsevolod Semenovich
  • Buntov Evgenij Aleksandrovich
  • Gavrilov Nikolaj Vasil'Evich
RU2486282C1
MATERIAL FOR CONVERSION OF VACUUM ULTRAVIOLET RADIATION INTO VISIBLE RANGE RADIATION IN FORM OF AMORPHOUS FILM OF SILICON OXIDE SiOS ON SILICON SUBSTRATE 2014
  • Zatsepin Anatolij Fedorovich
  • Kortov Vsevolod Semenovich
  • Buntov Evgenij Aleksandrovich
  • Pustovarov Vladimir Alekseevich
  • Hans-Joachim Fitting
RU2584205C2
METHOD OF OBTAINING CONVERTER OF VACUUM ULTRAVIOLET RADIATION INTO VISIBLE RANGE RADIATION IN FORM OF AMORPHOUS SILICON OXIDE SiO FILM ON SILICON SUBSTRATE 2013
  • Kortov Vsevolod Semenovich
  • Zatsepin Anatolij Fedorovich
  • Buntov Evgenij Aleksandrovich
RU2534173C2
CONVERTER OF VACUUM ULTRAVIOLET RADIATION INTO RADIATION OF VISIBLE RANGE IN FORM OF AMORPHOUS SILICON OXIDE SiO FILM ON SILICON SUBSTRATE 2013
  • Zatsepin Anatolij Fedorovich
  • Kortov Vsevolod Semenovich
  • Buntov Evgenij Aleksandrovich
  • Pustovarov Vladimir Alekseevich
RU2526344C1
METHOD OF PRODUCING PHOSPHOR IN FORM OF AMORPHOUS FILM OF SILICON DIOXIDE WITH SELENIUM IONS ON SILICON SUBSTRATE 2012
  • Zatsepin Anatolij Fedorovich
  • Kortov Vsevolod Semenovich
  • Buntov Evgenij Aleksandrovich
RU2504600C1
METHOD FOR PRODUCING SILICA GLASS IMPLANTED WITH ZINC IONS 2014
  • Kortov Vsevolod Semenovich
  • Zatsepin Anatolij Fedorovich
  • Buntov Evgenij Aleksandrovich
  • Gavrilov Nikolaj Vasil'Evich
RU2568456C1
ZINC ION-IMPLANTED QUARTZ GLASS 2014
  • Zatsepin Anatolij Fedorovich
  • Buntov Evgenij Aleksandrovich
  • Kortov Vsevolod Semenovich
  • Gavrilov Nikolaj Vasilevich
RU2585009C1
METHOD OF PRODUCING NANOCOMPOSITE LUMINOPHOR IN FORM OF QUARTZ GLASS CONTAINING COPPER NANOCLUSTERS 2010
  • Kortov Vsevolod Semenovich
  • Zatsepin Anatolij Fedorovich
  • Gavrilov Nikolaj Vasil'Evich
RU2443748C1
METHOD OF PRODUCING NANOCOMPOSITE LUMINOPHORE IN FORM OF QUARTZ GLASS CONTAINING COPPER AND TITANIUM NANOCLUSTERS 2010
  • Kortov Vsevolod Semenovich
  • Zatsepin Anatolij Fedorovich
  • Gavrilov Nikolaj Vasil'Evich
  • Kurmaev Ehrnst Zagidovich
  • Zatsepin Dmitrij Anatol'Evich
RU2453577C2
PRODUCTION OF POROUS SILICON WITH STABLE PHOTO LUMINESCENCE 2014
  • Mel'Nik Nikolaj Nikolaevich
  • Tregulov Vadim Viktorovich
RU2568954C1

RU 2 535 244 C1

Authors

Zatsepin Anatolij Fedorovich

Buntov Evgenij Aleksandrovich

Kortov Vsevolod Semenovich

Dates

2014-12-10Published

2013-06-18Filed