METHOD OF PRODUCING QUARTZ GLASS IMPLANTED WITH TIN IONS Russian patent published in 2013 - IPC C23C14/48 

Abstract RU 2486282 C1

FIELD: physics.

SUBSTANCE: tin ions are implanted into quartz glass and the quartz glass implanted with tin ions is annealed in an air atmosphere. Tin ion implantation is carried out in pulsed mode with pulse duration of 0.3-0.4 ms, pulse repetition frequency of 12.5-20 Hz, pulsed ionic current density of 0.8-0.9 mA/cm2, exposure dose of (4.5-5)×1016 ions/cm2, tin ion energy of 30-35 keV and silicon dioxide temperature of 60-350°C. Annealing is carried out at temperature of 800-900°C for 50-70 minutes in an air atmosphere.

EFFECT: obtaining glass with a high level of radiation intensity in the near-infrared range.

2 dwg, 1 tbl, 3 ex

Similar patents RU2486282C1

Title Year Author Number
METHOD FOR PRODUCING SILICA GLASS IMPLANTED WITH ZINC IONS 2014
  • Kortov Vsevolod Semenovich
  • Zatsepin Anatolij Fedorovich
  • Buntov Evgenij Aleksandrovich
  • Gavrilov Nikolaj Vasil'Evich
RU2568456C1
ZINC ION-IMPLANTED QUARTZ GLASS 2014
  • Zatsepin Anatolij Fedorovich
  • Buntov Evgenij Aleksandrovich
  • Kortov Vsevolod Semenovich
  • Gavrilov Nikolaj Vasilevich
RU2585009C1
METHOD OF PRODUCING NANOCOMPOSITE LUMINOPHOR IN FORM OF QUARTZ GLASS CONTAINING COPPER NANOCLUSTERS 2010
  • Kortov Vsevolod Semenovich
  • Zatsepin Anatolij Fedorovich
  • Gavrilov Nikolaj Vasil'Evich
RU2443748C1
METHOD OF PRODUCING NANOCOMPOSITE LUMINOPHORE IN FORM OF QUARTZ GLASS CONTAINING COPPER AND TITANIUM NANOCLUSTERS 2010
  • Kortov Vsevolod Semenovich
  • Zatsepin Anatolij Fedorovich
  • Gavrilov Nikolaj Vasil'Evich
  • Kurmaev Ehrnst Zagidovich
  • Zatsepin Dmitrij Anatol'Evich
RU2453577C2
DOPED QUARTZ GLASS WITH TETRAHEDRAL COORDINATION OF TITANIUM ATOMS 2011
  • Kortov Vsevolod Semenovich
  • Zatsepin Dmitrij Anatol'Evich
  • Zatsepin Anatolij Fedorovich
  • Gavrilov Nikolaj Vasil'Evich
  • Kurmaev Ehrnst Zagidovich
RU2477711C1
MATERIAL FOR CONVERSION OF VACUUM ULTRAVIOLET RADIATION INTO VISIBLE RANGE RADIATION IN FORM OF AMORPHOUS FILM OF SILICON OXIDE SiOS ON SILICON SUBSTRATE 2014
  • Zatsepin Anatolij Fedorovich
  • Kortov Vsevolod Semenovich
  • Buntov Evgenij Aleksandrovich
  • Pustovarov Vladimir Alekseevich
  • Hans-Joachim Fitting
RU2584205C2
CONVERTER OF VACUUM ULTRAVIOLET RADIATION INTO RADIATION OF VISIBLE RANGE IN FORM OF AMORPHOUS SILICON OXIDE SiO FILM ON SILICON SUBSTRATE 2013
  • Zatsepin Anatolij Fedorovich
  • Kortov Vsevolod Semenovich
  • Buntov Evgenij Aleksandrovich
  • Pustovarov Vladimir Alekseevich
RU2526344C1
METHOD OF OBTAINING CONVERTER OF VACUUM ULTRAVIOLET RADIATION INTO VISIBLE RANGE RADIATION IN FORM OF AMORPHOUS SILICON OXIDE SiO FILM ON SILICON SUBSTRATE 2013
  • Kortov Vsevolod Semenovich
  • Zatsepin Anatolij Fedorovich
  • Buntov Evgenij Aleksandrovich
RU2534173C2
METHOD OF PRODUCING DOPED QUARTZ GLASS WITH TETRAHEDRAL COORDINATION OF TITANIUM ATOMS 2011
  • Kortov Vsevolod Semenovich
  • Zatsepin Dmitrij Anatol'Evich
  • Zatsepin Anatolij Fedorovich
  • Gavrilov Nikolaj Vasil'Evich
  • Kurmaev Ehrnst Zagidovich
RU2461665C1
TIN ION-IMPLANTED SILICON OXIDE FILM ON SILICON SUBSTRATE 2013
  • Zatsepin Anatolij Fedorovich
  • Buntov Evgenij Aleksandrovich
  • Kortov Vsevolod Semenovich
RU2535244C1

RU 2 486 282 C1

Authors

Zatsepin Anatolij Fedorovich

Kortov Vsevolod Semenovich

Buntov Evgenij Aleksandrovich

Gavrilov Nikolaj Vasil'Evich

Dates

2013-06-27Published

2011-11-17Filed