METHOD FOR CHANGING PHOTOLUMINESCENCE WAVELENGTH OF POROUS SILICON Russian patent published in 2023 - IPC H01L21/265 H01L31/18 B82Y40/00 

Abstract RU 2809636 C1

FIELD: physics.

SUBSTANCE: methods for nanostructuring and modifying the surface properties of silicon nanomaterials. A method for changing the photoluminescence wavelength of porous silicon as a result of modifying the surface of porous silicon with ion beams, according to the invention, involves irradiating a flat surface of a porous silicon sample placed in a vacuum with energetic ion fluxes with a flux density of 0.01-0.5 μA/cm2, ensuring a displacement parameter per atom (DPA) from 0 to 1.

EFFECT: possibility to controllably change the value of the maximum wavelength of photoluminescence of porous silicon using ion irradiation, as a result of changing the DPA value - the number of displacements per atom.

7 cl, 2 dwg

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RU 2 809 636 C1

Authors

Shemukhin Andrej Aleksandrovich

Balakshin Yurij Viktorovich

Vorobeva Ekaterina Andreevna

Evseev Aleksandr Pavlovich

Nazarov Anton Viktorovich

Dates

2023-12-14Published

2023-03-01Filed