ZINC ION-IMPLANTED QUARTZ GLASS Russian patent published in 2016 - IPC C09K11/54 C23C14/10 C23C14/48 B82B3/00 B82Y20/00 

FIELD: glass.

SUBSTANCE: invention relates to quartz glass implanted with zinc ions, and can be used in making micro-components (nano-) and optoelectronic devices, particularly microminiature light sources for planar thin-film waveguide systems and optical integrated circuits. Quartz glass is a base of silicon dioxide with modified coating layer containing single-phase inclusion in form of crystalline nanoclusters of Zn₂SiO₄, which have diameters 4÷10 nm and distributed in surface layer of glass on depths 10÷50 nm. Glass is produced by implantation in a pulsed mode with a pulse duration of 0.3-0.4 ms, pulse repetition frequency 12.5-20 Hz, pulse current density of 0.8-0.9 mA/cm², dose (4.5-5)·10¹⁶ ions/cm², ion energy of 30-35 keV and temperature of silica of 60-350 °C.

EFFECT: obtained glass is characterised by high specific intensity in green spectral region (500-600 nm).

1 cl, 2 dwg, 1 tbl, 3 ex