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2 461 665

(13)

(51)

IPC

C23C14/48(2006-01-01)

(21) (22)

Application

2011134178/02, 2011-08-12

(24)

Start date

2011-08-12

(22)

Actual filing date

2011-08-12

(45)

Published

2012-09-20

(72)

Inventor

Kortov Vsevolod SemenovichZatsepin Dmitrij Anatol'EvichZatsepin Anatolij FedorovichGavrilov Nikolaj Vasil'EvichKurmaev Ehrnst Zagidovich

(73)

Holder

Federal'Noe Gosudarstvennoe Avtonomnoe Obrazovatel'Noe Uchrezhdenie Vysshego Professional'Nogo Obrazovanija Federal'Nyj Universitet Imeni Pervogo Prezidenta Rossii B.N. El'Tsina"

METHOD OF PRODUCING DOPED QUARTZ GLASS WITH TETRAHEDRAL COORDINATION OF TITANIUM ATOMS Russian patent published in 2012 - IPC C23C14/48

Abstract RU 2461665 C1

FIELD: metallurgy.

SUBSTANCE: proposed method comprises implanting titanium ions in quartz glass in pulse mode with radiation dose of (1-9)·10¹⁶ cm^-2 at titanium ion energy of 25-35 keV, ion current pulse density of 0.2-10 mA/cm² and quartz glass temperature of 250-300°C under isothermal conditions.

EFFECT: simplified process to assist in fabricating functional micro and nano devices.

1 dwg, 1 tbl, 5 ex

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RU 2 461 665 C1

Authors

Kortov Vsevolod Semenovich

Zatsepin Dmitrij Anatol'Evich

Zatsepin Anatolij Fedorovich

Gavrilov Nikolaj Vasil'Evich

Kurmaev Ehrnst Zagidovich

Dates

2012-09-20—Published

2011-08-12—Filed