FIELD: electronic equipment.
SUBSTANCE: invention relates to source of electrons, intended for use in field-emission electronic devices. Source comprises multiple controlled field-emission cells formed on substrate 1 coated with insulation 2 and conducting layers 3, having multiple holes (4, 5). In each of such holes on substrate field-emission emitter 7 is placed. Each cell is formed by emitter 7, which together with his part of substrate cathode cell, and its control electrode is part of this layer adjacent to hole 5 in conducting layer 3. Feature of this source is fact that substrate 1 around emitter 7 has annular groove 9, which surface is coated with insulating material (10.1, 12.1) or oxidised.
EFFECT: increased electric strength gaps control electrode-emitter due to increased electric strength of surface structure elements, separating said electrodes.
4 cl, 4 dwg
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Authors
Dates
2016-06-10—Published
2014-12-12—Filed