METHOD OF STUDYING THREE-DIMENSIONAL STRUCTURES BY MEANS OF SCANNING OPTICAL PROBE NANOTOMOGRAPHY Russian patent published in 2019 - IPC G01Q60/00 B82Y35/00 

FIELD: nanotechnologies.

SUBSTANCE: invention relates to nanotechnology and can be used to study samples, such as biomaterials and medical devices, by scanning probe microscopy. Method of studying three-dimensional structures by scanning optical probe nanotomography includes the implementation of the first cut of the three-dimensional structure with a knife and the first study of the first cut surface of a sample of a three-dimensional structure and its internal zones with a probe with a sensitive element of a scanning probe microscope, the second cut of the three-dimensional structure with a knife in accordance with the results of the first study and the second study of the second cut surface of the sample of the three-dimensional structure and its internal zones with a probe with a sensitive element of a scanning probe microscope. After the first cut of the three-dimensional structure with a knife, the first optical study of the first cut surface of the sample of the three-dimensional structure and its internal zones is carried out, and the second cut of the three-dimensional structure is also carried out according to the results of the first optical study of the first cut surface of the sample of the three-dimensional structure and its internal zones.

EFFECT: expanding the functionality of the method of studying three-dimensional structures.

15 cl, 4 dwg