METHOD FOR PLASMA DEPOSITION OF POLYMER COATS AND INSTALLATION FOR ITS REALISATION Russian patent published in 2010 - IPC C23C16/22 C23C16/50 B05D3/14 H01L21/205 

FIELD: electricity.

SUBSTANCE: treated samples are placed in vacuum chamber. Vacuum chamber is filled with reaction gas, which contains at least one gas-monomer capable of plasma polymerisation. Plasma is generated by means of ignition and maintenance of double-staged glowing discharge in two spatially separated discharge volumes, and polymer coat is deposited onto surface of treated sample. The first discharge volume is separated from the second discharge volume with the help of perforated electrode, size of holes in which exceeds 0.1 mm. Treated sample is installed on electrode, which is placed in the second discharge volume opposite to perforated electrode. To electrode that serves as holder of treated sample, potential of shift is supplied versus perforated electrode. In the first discharge volume there might be various types of gas discharge used: inductive high-frequency discharge, capacitance high-frequency discharge, DC discharge. Discharge may be maintained in pulse form. In process of plasma polymerisation distance is adjusted between perforated electrode and electrode that serves as holder of treated sample.

EFFECT: independent control of polymer coat deposition speed, structure and properties of deposited coat with high efficiency of technological process.

14 cl, 1 dwg