METHOD OF MAKING FLEXIBLE THERMOELECTRIC MODULE Russian patent published in 2016 - IPC H01L35/34 

FIELD: electricity.

SUBSTANCE: invention can be used for creation of flexible thermoelectric module. Substance of invention consists in, that method of making flexible thermoelectric module includes production of polyimide film and sputtering of functional layers onto it in vacuum chamber by means of laser, polyimide film is obtained on metal base with polished surface, that is installed on horizontal centrifuge, performed its rotation and at same time feed of polyamide imide solution by means of bather on its working surface for 30-120 s to obtain specified film thickness, base with applied polyamide imide film is placed in vacuum chamber with heaters and targets from materials for creation of buffer, semiconductor and switching layers and film is dried, then, conducting laser deposition of functional layers in several stages: a) oxygen is fed into chamber and with simultaneous rotation of target and base with deposited film laser ablation of target from titanium is conducted with formation of titanium oxide buffer layer on polyimide layer; b) chamber is evacuated for high vacuum, heater is switched on for 150-170 °C depending on thickness of applied layer, rotation of target and rotation of the substrate are switched on, mask is installed for n-type layer of branches and laser ablation of n-type target material is conducted with formation of n-type branches on surface of polyimide; c) mask for a layer of p-type branches is installed, p-type conductivity target is fed to laser exposure zone, laser ablation of p-type target material is conducted with formation of p-type branches on surface of polyimide; d) mask for switching layer is installed, target for creating metallization layer is fed to laser exposure zone, laser ablation of target material is performed, and layer of metal coating is created, electrically switching semiconductor paths between each other in series, to create contact pads on ends of thermoelectric module, after creation of functional layers chamber is depressurized, extracted from base, which is then for separation of obtained module is held in ultrasonic bath with power of 25-50 W for 5 minutes in deionized distilled water, thermoelectric module is removed from base and dried.

EFFECT: technological result: possibility of product quality increasing.

10 cl, 3 dwg