METHOD OF FORMING CONTACT PADS ON YBACUO FILMS Russian patent published in 2015 - IPC H01L39/24 

FIELD: chemistry.

SUBSTANCE: invention relates to formation of gold contact pads on YBa₂Cu₃O_7-x films on dielectric substrates. In the method of forming gold contact pads on YBa₂Cu₃O_7-x films on a dielectric substrate, contact pads are formed before sputtering YBa₂Cu₃O_7-x films on the dielectric substrate by heating a target and a substrate to 450-500°C, spraying the gold contact pad by laser sputtering a target made of gold with a solid-state pulsed laser with radiation wavelength of 1.06 mcm, pulse duration of 10-20 ns, pulse repetition frequency of 10 Hz and laser radiation power density of (5-7)·10⁸ W/cm². The dielectric substrate is placed 4-6 mm from the gold target with the working surface facing the target, at vacuum chamber pressure of 0.1-0.5 Pa.

EFFECT: obtaining high-quality gold contact pads on superconducting films.

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