METHOD FOR MANUFACTURING THERMOELECTRIC ELEMENT FOR THERMOELECTRIC DEVICES Russian patent published in 2017 - IPC C23C14/34 B82B1/00 H01L35/00 C23C14/56 

Abstract RU 2632729 C1

FIELD: electricity.

SUBSTANCE: at first the received flexible tape is wound on a drum which is located in a vacuum chamber. Vacuum deposition of the thermoelectric material on its opposite sides is carried out. The tape is successively stretched by means of deflecting and tensioning rollers through the first heating zone and pulsed laser deposition of the thermoelectric material of the p-conductivity type to the heated area of one side of the tape. The tape is turned in the turn device and the tape is stretched through the second local heating zone to a predetermined temperature and pulsed laser deposition of the thermoelectric material of the n-conductivity type to the heated area of the opposite side of the tape. Then the tape is stretched through the zone of simultaneous formation of technological pattern on both sides of the tape by laser evaporation of the thermoelectric material on each of its sides. The tape is wound with the obtained two-sided technological pattern on the second drum.

EFFECT: improvement of the method.

2 dwg

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RU 2 632 729 C1

Authors

Shupenev Aleksandr Evgenevich

Grigoryants Aleksandr Grigorevich

Dates

2017-10-09Published

2016-12-15Filed