FIELD: electrical engineering.
SUBSTANCE: invention relates to electrical engineering and can be used for driving of various devices in precision instruments making, in optical systems, in nanotechnologies systems. Piezoelectric actuator control device comprises working electrodes installed on its one opposite edges. Piezo motor contains voltage amplifier, frequency setting unit, connected with comparator element and with control voltage control unit. Bridge measuring circuit consists of first and second resistors, which form two opposite arms, four capacitors, second and third of which form two other opposite arms, and first and fourth capacitors are connected parallel to first and second resistors, respectively. Also included are control voltage generating unit, integrator, comparator, current amplifier and optocouple. First and fourth capacitors electrodes have comb shape and are made on piezoelectric element other opposite edges, parallel to direction of movement. Bridge measuring circuit measuring diagonal first output is connected to integrator first input, and its second output is connected to integrator second input and comparator second input. Integrator output is connected to comparator first input. Comparator output is connected to current amplifier input, to integrator third input and bridge measuring circuit supply diagonal first output, which second output is connected to common power bus. Current amplifier output is connected to optocouple input, and its output is connected to comparator second input and to frequency setting unit first input, having second input to supply control signal. Frequency setting unit output is connected to comparison element first input and control voltage control unit second input, and its output via control voltage forming unit is connected to voltage amplifier input, which output terminals are connected to piezo actuator outputs.
EFFECT: technical result consists in simplification of control and increasing reliability and reduction of dimensions.
1 cl, 8 dwg
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