SELF-SENSING MULTILAYER PIEZOELECTRIC ACTUATOR Russian patent published in 2017 - IPC H04R17/10 

FIELD: physics.

SUBSTANCE: invention relates to metrology. The piezoelectric actuator comprises piezoceramic sections, each of which consists of a pair of piezoelectric elements connected mechanically to each other and having one flat electrode on one flat surface and two flat electrodes on other opposite flat surface, mounted so that the two flat electrodes of one piezoelectric element facie the two flat electrodes of the other piezoelectric element within the piezoceramic section. Moreover, two electrodes of one piezoelectric element are electrically connected to two electrodes of the other piezoelectric element, respectively, and act as measuring electrodes of the piezoceramic section, connected to the measuring inputs of the electric signal driver, which consists of a measuring capacitance-type transducer connected in series to the voltage setting self-control unit with a control input. The input control electrodes of the piezoceramic sectios are represented by the single flat electrode of one piezoelectric element and the single flat electrode of the other piezoelectric element, located outside this section, which are connected to the voltage setting self-control unit.

EFFECT: invention enhances control reliability and accuracy in the field of metrology.

5 dwg