METHOD AND SYSTEM FOR CONVERGENT POLISHING Russian patent published in 2017 - IPC B24B7/04 

Abstract RU 2610991 C2

FIELD: technological processes.

SUBSTANCE: invention relates to abrasive processing and can be used for finishing of optical elements. System includes a polishing pad having a radial dimension (r), measured from centre of polishing pad, and a diaphragm arranged on polishing pad and configured to partially surround optical element. Latter is in contact with polishing pad within range of radial dimension. Diaphragm has a shape characterised by peripheral width fs(r) in a direction transverse to optical element, determined depending on radial dimension ensuring constant rate of wear of polishing pad as a function of radial dimension within range of radial dimension.

EFFECT: higher quality of treated surfaces by preventing scratches.

13 cl, 26 dwg, 1 tbl

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RU 2 610 991 C2

Authors

Suratvala, Taijab I.

Stil, Uillyam A.

Fejt, Majkl D.

Dezharden, Richard P.

Mejson, Deniel K.

Dajlla-Spirs, Rebekka Dzh.

Vong, Lana L.

Miller, Filip E.

Geroti, Pol

Byud, Dzheffri D.

Dates

2017-02-17Published

2012-03-20Filed