FLOW GUIDE DEVICE FOR TWO-ELECTRODE DISCHARGE CHAMBER, TWO-ELECTRODE DISCHARGE CHAMBER WITH ITS USE AND EXCIMER LASER Russian patent published in 2017 - IPC H01S3/97 

FIELD: physics.

SUBSTANCE: flow guide device for the laser discharge chamber has a symmetrical configuration and includes two pairs of electrodes. Flow guide device comprises two rotors that correspond to one pair of the two pairs of the electrodes respectively. The established positions of the rotors are symmetrical against the symmetry plane of the discharge chamber and are under the electrodes. The rotation axis of the rotors is parallel to the axial direction of the electrodes, which is parallel to the base plane of the discharge chamber. The said rotors have opposite directions and identical rotation speeds. A bottom spoiler plate is set under each rotor, configured to prevent the gas flow passage under the rotors. Herewith, the upper spoiler plate reaches from the set position under each pair of the electrodes to the corresponding rotor. The upper flow guide plate is set between the end of the flow guide plate and the upper side of the electrode. The upper flow guide plate and the upper spoiler plate form a gradually tapering intermediate channel.

EFFECT: providing opportunities to increase energy and laser reliability.

7 cl, 9 dwg