SINGLE-CAVITY TWO-ELECTRODE DISCHARGE CHAMBER AND EXCIMER LASER Russian patent published in 2016 - IPC H01S3/38 

FIELD: optical system; electricity.

SUBSTANCE: invention relates to laser engineering, particularly, to one-cavity two-chamber discharge chamber for photolithography and to excimer laser, comprising such a discharge chamber. Discharge chamber can contain a chamber body and two sets of the main discharge electrodes. Chamber body can contain left and right compartments, arranged so that they form a symmetrical chamber with two compartments. Each of the compartments can have a cross section, which is relatively small on the upper side, but relatively big on the lower side, forming a "pear" shape. Left and right compartments can have an interface and communicate with each other in the plane of symmetry of the whole discharge chamber. Two sets of the main discharge electrodes can be located respectively in the left and right sections on the upper side. One-cavity configuration can be used to provide functions of configuration with two chambers, such as, for example, configuration of MOPA, MOPO and MOPRA.

EFFECT: simplified design and synchronisation of discharge in discharge chamber.

18 cl, 11 dwg